| 1.Bonding area | ≤12inch |
| 2.Mechanical pressure | 5T |
| 3.Bonding force | 0.4Mpa |
| 4.Vacuum | Limited 3Pa, working vacuum 10-200Pa |
| 5.Max temperature | 320℃ |
| 6.Temperature uniformity | ≤±1% |
| 7.Heating rate | 20-40℃/min |
| 8.Cooling rate | 10-30℃/min |
| 9. Cooling way | Water cooling + nitrogen cooling |
| 10.Post-Sintering Shear Strength | 25-35Mpa |
| 11.Feeding way | Manual |
| 12.Voltage | 380V, 25-50A |
| 13.Size |
| 1.Bonding area | ≤12inch |
| 2.Mechanical pressure | 5T |
| 3.Bonding force | 0.4Mpa |
| 4.Vacuum | Limited 3Pa, working vacuum 10-200Pa |
| 5.Max temperature | 320℃ |
| 6.Temperature uniformity | ≤±1% |
| 7.Heating rate | 20-40℃/min |
| 8.Cooling rate | 10-30℃/min |
| 9. Cooling way | Water cooling + nitrogen cooling |
| 10.Post-Sintering Shear Strength | 25-35Mpa |
| 11.Feeding way | Manual |
| 12.Voltage | 380V, 25-50A |
| 13.Size |