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    Vacuum Plasma Cleaner VPC3i(Online)
    • Vacuum Plasma Cleaner VPC3i(Online)

    Vacuum Plasma Cleaner VPC3i(Online)

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    1.Chamber size350*100*85mm
    2.Chamer capacity
    3.Effective size350*100*85mm
    4.Electrode distributiononline
    5.RF power supply13.56MHZ 300W
    6.Current
    7.Vacuum10 Pa
    8.Process gasAr N2 O2,N2H2 mixture
    9.Temperature measurement system
    10.Power380VAC，20A
    11.Size550*1260*1480mm(no including buzzer)
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    • Characteristic：

                                               

      1.Chamber size350*100*85mm
      2.Chamer capacity
      3.Effective size350*100*85mm
      4.Electrode distributiononline
      5.RF power supply13.56MHZ 300W
      6.Current
      7.Vacuum10 Pa
      8.Process gasAr N2 O2,N2H2 mixture
      9.Temperature measurement system
      10.Power380VAC，20A
      11.Size550*1260*1480mm(no including buzzer)
      Vacuum Plasma Cleaner VPC3i(Online)

    •                                          

      1.Chamber size350*100*85mm
      2.Chamer capacity
      3.Effective size350*100*85mm
      4.Electrode distributiononline
      5.RF power supply13.56MHZ 300W
      6.Current
      7.Vacuum10 Pa
      8.Process gasAr N2 O2,N2H2 mixture
      9.Temperature measurement system
      10.Power380VAC，20A
      11.Size550*1260*1480mm(no including buzzer)
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