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    Vacuum Plasma Cleaner VPC42 (offiline)
    • Vacuum Plasma Cleaner VPC42 (offiline)

    Vacuum Plasma Cleaner VPC42 (offiline)

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    1.Chamber sizeW350xH350xD350mm
    2.Chamer capacity42L
    3.Effective sizeW350xD250
    4.Electrode distribution15 layers
    5.RF power supply13.56MHz，0-300W
    6.Current12A
    7.Vacuum5Pa
    8.Process gasAr N2(4-line is optional)
    9.Temperature measurement system1 set
    10.PowerAC380V 50-60Hz
    11.Size850*960*1680mm(no including buzzer)
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    • Characteristic：

                                               

      1.Chamber sizeW350xH350xD350mm
      2.Chamer capacity42L
      3.Effective sizeW350xD250
      4.Electrode distribution15 layers
      5.RF power supply13.56MHz，0-300W
      6.Current12A
      7.Vacuum5Pa
      8.Process gasAr N2(4-line is optional)
      9.Temperature measurement system1 set
      10.PowerAC380V 50-60Hz
      11.Size850*960*1680mm(no including buzzer)
      Vacuum Plasma Cleaner VPC42 (offiline)

    •                                          

      1.Chamber sizeW350xH350xD350mm
      2.Chamer capacity42L
      3.Effective sizeW350xD250
      4.Electrode distribution15 layers
      5.RF power supply13.56MHz，0-300W
      6.Current12A
      7.Vacuum5Pa
      8.Process gasAr N2(4-line is optional)
      9.Temperature measurement system1 set
      10.PowerAC380V 50-60Hz
      11.Size850*960*1680mm(no including buzzer)
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