Getter Thermal Activation High Vacuum Sealing and Welding Furnace — VH2Plus

The VH series high vacuum sealing and welding furnace is a professional piece of equipment dedicated to Getter thermal activation. Adopting top and bottom infrared heating and equipped with a controllable process atmosphere system for nitrogen and formic acid, it is capable of operating under both high vacuum and protective atmosphere conditions. The furnace can simultaneously complete high-temperature activation of getters and low-temperature welding of chips. With high temperature control accuracy and stable process performance, it achieves ultra-low void rate and superior air tightness for welded devices. The equipment shell adopts a water cooling design to ensure reliable long-term operation. Core Process Advantages The furnace enables thermal insulation protection for 130℃ low-temperature solder while conducting 350℃ high-temperature Getter thermal activation, realizing the integration of 350℃ Getter high-temperature activation and 180℃ low-temperature chip welding in a single equipment chamber. Key Performance Indicators Ultimate vacuum degree: Up to 10⁻⁵Pa Temperature control accuracy: High-precision temperature control with stable process execution Atmosphere control: Controllable nitrogen/formic acid atmosphere, supporting both vacuum and atmosphere operation modes Applicable Scenarios & Production Capacity Applicable devices: High vacuum packaging and welding of MEMS devices, PGA ceramic packaged infrared chips (package size range: 5×5~45×45mm) Production capacity: Meets the mass packaging production requirements of ceramic packaged infrared chips and MEMS chips Intelligent Process & Error Prevention Functions Material error prevention: Connectable to the MES system for automatic ID reading to avoid material misloading. Core process foolproofing: Automatically compares the device's key parameters with the process parameters stored on the MES server upon startup; welding can only be performed if the parameters match. Customizable real-time parameter comparison (at set time intervals) during the process, with automatic alarm and manual intervention prompt if parameters exceed the threshold. Data acquisition: Full-process real-time data acquisition of key process parameters for traceability and analysis. MES system integration: Seamless connection with the MES system to realize intelligent data interaction and process management. Standard Configuration Getter thermal activation vacuum sealing and welding furnace main unit × 1 set Industrial water chiller × 1 unit Vacuum dry pump × 1 unit Turbomolecular pump × 1 unit Optional Configuration Top heating module (suitable for welding products with high-size jigs) Ion pump