| 1.Chamber size | φ500mmx500mm |
| 2.Chamber material | Quartz |
| 3.Pumping speed | 0.1Mpa-5E-5Pa Time ≤ lH |
| 4.Heating way | Heat all around |
| 5.Heating temperature | RT+20℃~+600°C |
| 6.Temp.control precision | ≤+0.5 ℃ |
| 7.Heating rate | Heating time from room temperature to 600°C<40min |
| 8.Cooling rate | Cooling time from 600' to room temperature <lh |
| 9.Cooling way | With water cooler,program control |
| 10.Temperature uniformity | ±3℃ at 150℃ and ±5℃ at 450° |
| 11.Voltage | 380V,50HZ |
| 12.Size | 980*1100*1800mm |
| 1.Chamber size | φ500mmx500mm |
| 2.Chamber material | Quartz |
| 3.Pumping speed | 0.1Mpa-5E-5Pa Time ≤ lH |
| 4.Heating way | Heat all around |
| 5.Heating temperature | RT+20℃~+600°C |
| 6.Temp.control precision | ≤+0.5 ℃ |
| 7.Heating rate | Heating time from room temperature to 600°C<40min |
| 8.Cooling rate | Cooling time from 600' to room temperature |
| 9.Cooling way | With water cooler,program control |
| 10.Temperature uniformity | ±3℃ at 150℃ and ±5℃ at 450° |
| 11.Voltage | 380V,50HZ |
| 12.Size | 980*1100*1800mm |